中文 |

Newsroom

USTC Designs New Coupled Shear Surface Acoustic Wave Resonator at High Frequency

Apr 14, 2024

Surface acoustic wave (SAW) resonators have been widely used in wireless communication below 2 GHz. However, as wireless communication evolves into 5G and 6G with the new frequency bands above 3 GHz and bandwidth exceeding 500 MHz, conventional SAW technology face bottlenecks in terms of high frequency (>3GHz), high quality factor (Q value), and high electromechanical coupling coefficient (k2).

The main limitation of traditional SAW technology is that it has been using single piezoelectric coefficient to achieve the conversion between electrical and mechanical energy.

In a study published in IEEE Electron Device Letters, a research team led by Prof. ZUO Chengjie from the University of Science and Technology of China (USTC) of the Chinese Academy of Sciences (CAS) developed a coupled Shear SAW (CS-SAW) resonator that utilizes two coupling coefficients of different directions (e16 and e34).

The team designed and prepared the CS-SAW resonator based on a LiNbO3-on-SiC (LNoSiC) substrate. By selecting the proper three-dimensional (3D) Euler angle (α) and designing the thickness (hLN) to wavelength (λ) ratio of the LiNbO3 thin film, it realized that the horizontal and vertical electric fields simultaneously excite two piezoelectric coefficients (e16 and e34), making them coherently coupled in one single vibration pattern.

Besides, the team showed that this CS-SAW resonator achieved an unprecedented high k2 of 34% at 5 GHz and an excellent figure of merit (FoM) up to 221. Compared to all reported SAW resonators above 4 GHz in the recent ten years, this CS-SAW resonator working at 5 GHz and 6 GHz have the highest FoM.

This study explored the possibility of coupling two or more piezoelectric coefficients in single vibration pattern, and designed a criterion for realizing such coupled shear modes. It provided insights into acoustics devices such as wideband filters, tunable resonators, and highly sensitive sensors.

Contact

Jane FAN Qiong

University of Science and Technology of China

E-mail:

Coupled Shear SAW Resonator With High Electromechanical Coupling Coefficient of 34% Using X-Cut LiNbO3-on-SiC Substrate

Related Articles
Contact Us
  • 86-10-68597521 (day)

    86-10-68597289 (night)

  • 86-10-68511095 (day)

    86-10-68512458 (night)

  • cas_en@cas.cn

  • 52 Sanlihe Rd., Xicheng District,

    Beijing, China (100864)

Copyright © 2002 - Chinese Academy of Sciences